Effects of Growth Conditions on Structural Properties of ZnO Nanostructures on Sapphire Substrate by Metal–Organic Chemical Vapor Deposition

Effects of Growth Conditions on Structural Properties of ZnO Nanostructures on Sapphire Substrate by Metal–Organic Chemical Vapor Deposition

<p>Abstract</p> <p>ZnO was grown on sapphire substrate by metal–organic chemical vapor deposition using the diethylzinc (DEZn) and oxygen (O<sub>2</sub>) as source chemicals at 500 °C. Influences of the chamber pressure and O<sub>2</sub>/D...

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Bibliographic Details
Main Authors:	Horng RH, Wu CC, Wuu DS, Lin PR, Chen TN
Format:	Article
Language:	English
Published:	SpringerOpen 2009-01-01
Series:	Nanoscale Research Letters
Subjects:	ZnO Chamber pressure O<sub>2</sub>/DEZn ratio Nanowall networks Self-catalyzed
Online Access:	http://dx.doi.org/10.1007/s11671-009-9257-2

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