Robust Optimization of a MEMS Accelerometer Considering Temperature Variations

Robust Optimization of a MEMS Accelerometer Considering Temperature Variations

A robust optimization approach for a MEMS accelerometer to minimize the effects of temperature variations is presented. The mathematical model of the accelerometer is built. The effects of temperature variations on the output performance of the accelerometer are determined, and thermal deformation o...

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Bibliographic Details
Main Authors: Guangjun Liu, Feng Yang, Xiaofan Bao, Tao Jiang
Format: Article
Language:English
Published: MDPI AG 2015-03-01
Series:Sensors
Subjects:
MEMS
accelerometer
robust optimization
temperature variations
sensitivity analysis
Online Access:http://www.mdpi.com/1424-8220/15/3/6342

Internet

http://www.mdpi.com/1424-8220/15/3/6342

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