Technology for boron-doped layers formation on the diamond
The authors investigated natural type IIa diamond crystals and CVD diamond films. The article presents electrophysical parameters of the structures obtained in different modes of ion implantation of boron into the crystal with further annealing. Parameters of the crystals with a high nitrogen impuri...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Politehperiodika
2012-10-01
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| Series: | Tekhnologiya i Konstruirovanie v Elektronnoi Apparature |
| Subjects: | |
| Online Access: | http://www.tkea.com.ua/tkea/2012/5_2012/pdf/09.zip |