Plasma parameters in 40 MHz Argon discharge

Plasma parameters in 40 MHz Argon discharge

Experimental data related to 40 MHz Argon plasma parameters in the RF power and pressure ranges of 25–200 W and 0.2–0.5 Torr are presented. Electron temperatures are obtained using both double probe and optical spectroscopy methods. Acceptable consistency between results is obtained. Double probe me...

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Bibliographic Details
Main Authors: A.A. Azooz, S. Cakir, D.A. Bleej
Format: Article
Language:English
Published: Elsevier 2015-01-01
Series:Results in Physics
Subjects:
Automated plasma diagnostics
Double probe
Argon plasma
Langmuir probe
Spectroscopic plasma diagnostics
40 GHz RF plasma
Online Access:http://www.sciencedirect.com/science/article/pii/S2211379715000066

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http://www.sciencedirect.com/science/article/pii/S2211379715000066

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