Nanoscale limits of angular optical scatterometry
Angular scatterometry is a fast, in-line, noncontact, and nondestructive nanoscale metrology tool that is widely used in manufacturing processes. As scatterometry is a potential metrology technique for next generation semiconductor manufacturing and for other emerging large-area (roll-to-roll) nanot...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2020-01-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.5092802 |