The influence of physical and technological magnetron sputtering modes on the structure and optical properties of CdS and CdTe films

To create technology for preparation of CdS and CdTe thin films by direct current magnetron sputtering, the influence of physical and technological condensation modes on the crystal structure and optical properties of these films were investigated. The laboratory method of DC magnetron sputtering wi...

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Bibliographic Details
Main Authors: G.S. Khrypunov, G.I. Kopach, M.M. Harchenko, A.І. Dobrozhan
Format: Article
Language:English
Published: National Academy of Sciences of Ukraine. Institute of Semi conductor physics. 2017-07-01
Series:Semiconductor Physics, Quantum Electronics & Optoelectronics
Subjects:
Online Access:http://journal-spqeo.org.ua/n2_2017/P262-267abstr.html