The influence of physical and technological magnetron sputtering modes on the structure and optical properties of CdS and CdTe films
To create technology for preparation of CdS and CdTe thin films by direct current magnetron sputtering, the influence of physical and technological condensation modes on the crystal structure and optical properties of these films were investigated. The laboratory method of DC magnetron sputtering wi...
Main Authors: | , , , |
---|---|
Format: | Article |
Language: | English |
Published: |
National Academy of Sciences of Ukraine. Institute of Semi conductor physics.
2017-07-01
|
Series: | Semiconductor Physics, Quantum Electronics & Optoelectronics |
Subjects: | |
Online Access: | http://journal-spqeo.org.ua/n2_2017/P262-267abstr.html |