Topography Measurement of Large-Range Microstructures through Advanced Fourier-Transform Method and Phase Stitching in Scanning Broadband Light Interferometry

Topography Measurement of Large-Range Microstructures through Advanced Fourier-Transform Method and Phase Stitching in Scanning Broadband Light Interferometry

Scanning broadband light interferometry (SBLI) has been widely utilized in surface metrology due to its non-contact and high-accuracy method. In SBLI, phase evaluation through Fourier Transform (FT) is a prevalent and efficient technique, where the topography measurement can often be achieved throug...

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Bibliographic Details
Main Authors: Yi Zhou, Yan Tang, Yong Yang, Song Hu
Format: Article
Language:English
Published: MDPI AG 2017-10-01
Series:Micromachines
Subjects:
spatial modulation
dimensional metrology
phase stitching
microstructure
Online Access:https://www.mdpi.com/2072-666X/8/11/319

Internet

https://www.mdpi.com/2072-666X/8/11/319

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