Proposal of An Equal-Stiffness and Equal-Stroke 2D Micro-Positioning Platform Driven by Piezoelectric Actuators
Micro-positioning platform plays an important role in the field of precision positioning such as microelectronics, robotics and biomedicine. This paper proposes an equal-stiffness and equal-stroke 2D micro-positioning platform, which is driven by piezoelectric actuators. The overall structure of the...
Main Authors: | , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2020-06-01
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Series: | Actuators |
Subjects: | |
Online Access: | https://www.mdpi.com/2076-0825/9/3/47 |