Proposal of An Equal-Stiffness and Equal-Stroke 2D Micro-Positioning Platform Driven by Piezoelectric Actuators

Proposal of An Equal-Stiffness and Equal-Stroke 2D Micro-Positioning Platform Driven by Piezoelectric Actuators

Micro-positioning platform plays an important role in the field of precision positioning such as microelectronics, robotics and biomedicine. This paper proposes an equal-stiffness and equal-stroke 2D micro-positioning platform, which is driven by piezoelectric actuators. The overall structure of the...

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Main Authors: Feng Sun, Yansong Hao, Fangchao Xu, Junjie Jin, Qiang Li, Ling Tong, Ming Zhang, Xiaoyou Zhang
Format: Article
Language:English
Published: MDPI AG 2020-06-01
Series:Actuators
Subjects:
micro-positioning platform
hourglass displacement amplification mechanism
long stroke
piezoelectric actuators
equal stiffness
Online Access:https://www.mdpi.com/2076-0825/9/3/47
id doaj-8c63ca56e56b4e50b8c15b4de94b4b57
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spelling doaj-8c63ca56e56b4e50b8c15b4de94b4b572020-11-25T03:14:12ZengMDPI AGActuators2076-08252020-06-019474710.3390/act9030047Proposal of An Equal-Stiffness and Equal-Stroke 2D Micro-Positioning Platform Driven by Piezoelectric ActuatorsFeng Sun0Yansong Hao1Fangchao Xu2Junjie Jin3Qiang Li4Ling Tong5Ming Zhang6Xiaoyou Zhang7School of Mechanical Engineering, Shenyang University of Technology, Shenyang 110801, ChinaSchool of Mechanical Engineering, Shenyang University of Technology, Shenyang 110801, ChinaSchool of Mechanical Engineering, Shenyang University of Technology, Shenyang 110801, ChinaSchool of Mechanical Engineering, Shenyang University of Technology, Shenyang 110801, ChinaSchool of Mechanical Engineering, Shenyang University of Technology, Shenyang 110801, ChinaSchool of Mechanical Engineering, Shenyang University of Technology, Shenyang 110801, ChinaSchool of Mechanical Engineering, Shenyang University of Technology, Shenyang 110801, ChinaSchool of Mechanical Engineering, Shenyang University of Technology, Shenyang 110801, ChinaMicro-positioning platform plays an important role in the field of precision positioning such as microelectronics, robotics and biomedicine. This paper proposes an equal-stiffness and equal-stroke 2D micro-positioning platform, which is driven by piezoelectric actuators. The overall structure of the 2D micro-positioning platform adopts a nested structure and the displacement magnification mechanism adopts two hourglass displacement magnification mechanisms. The displacement magnification ratio of the hourglass displacement magnification mechanism was studied, and its structural parameters were optimized. Static stiffness analysis and simulation analysis of the micro-positioning platform were carried out. The simulation stiffness of the micro-positioning platform in the XY direction is 46873 N/m and 46832 N/m respectively. The experimental prototype of the micro-positioning platform was built. Through the measurement experiment with the prototype, the maximum stroke of the micro-positioning platform in the XY direction is 489μm and 493μm respectively; the maximum coupling ratio in the XY direction is 2.38% and 2.70% respectively. The research indicates that the micro-positioning platform had the characteristics of small size, equal long stroke, equal stiffness and low coupling ratio in the XY direction.https://www.mdpi.com/2076-0825/9/3/47micro-positioning platformhourglass displacement amplification mechanismlong strokepiezoelectric actuatorsequal stiffness
collection DOAJ
language English
format Article
sources DOAJ
author Feng Sun
Yansong Hao
Fangchao Xu
Junjie Jin
Qiang Li
Ling Tong
Ming Zhang
Xiaoyou Zhang
spellingShingle Feng Sun
Yansong Hao
Fangchao Xu
Junjie Jin
Qiang Li
Ling Tong
Ming Zhang
Xiaoyou Zhang
Proposal of An Equal-Stiffness and Equal-Stroke 2D Micro-Positioning Platform Driven by Piezoelectric Actuators
Actuators
micro-positioning platform
hourglass displacement amplification mechanism
long stroke
piezoelectric actuators
equal stiffness
author_facet Feng Sun
Yansong Hao
Fangchao Xu
Junjie Jin
Qiang Li
Ling Tong
Ming Zhang
Xiaoyou Zhang
author_sort Feng Sun
title Proposal of An Equal-Stiffness and Equal-Stroke 2D Micro-Positioning Platform Driven by Piezoelectric Actuators
title_short Proposal of An Equal-Stiffness and Equal-Stroke 2D Micro-Positioning Platform Driven by Piezoelectric Actuators
title_full Proposal of An Equal-Stiffness and Equal-Stroke 2D Micro-Positioning Platform Driven by Piezoelectric Actuators
title_fullStr Proposal of An Equal-Stiffness and Equal-Stroke 2D Micro-Positioning Platform Driven by Piezoelectric Actuators
title_full_unstemmed Proposal of An Equal-Stiffness and Equal-Stroke 2D Micro-Positioning Platform Driven by Piezoelectric Actuators
title_sort proposal of an equal-stiffness and equal-stroke 2d micro-positioning platform driven by piezoelectric actuators
publisher MDPI AG
series Actuators
issn 2076-0825
publishDate 2020-06-01
description Micro-positioning platform plays an important role in the field of precision positioning such as microelectronics, robotics and biomedicine. This paper proposes an equal-stiffness and equal-stroke 2D micro-positioning platform, which is driven by piezoelectric actuators. The overall structure of the 2D micro-positioning platform adopts a nested structure and the displacement magnification mechanism adopts two hourglass displacement magnification mechanisms. The displacement magnification ratio of the hourglass displacement magnification mechanism was studied, and its structural parameters were optimized. Static stiffness analysis and simulation analysis of the micro-positioning platform were carried out. The simulation stiffness of the micro-positioning platform in the XY direction is 46873 N/m and 46832 N/m respectively. The experimental prototype of the micro-positioning platform was built. Through the measurement experiment with the prototype, the maximum stroke of the micro-positioning platform in the XY direction is 489μm and 493μm respectively; the maximum coupling ratio in the XY direction is 2.38% and 2.70% respectively. The research indicates that the micro-positioning platform had the characteristics of small size, equal long stroke, equal stiffness and low coupling ratio in the XY direction.
topic micro-positioning platform
hourglass displacement amplification mechanism
long stroke
piezoelectric actuators
equal stiffness
url https://www.mdpi.com/2076-0825/9/3/47
work_keys_str_mv AT fengsun proposalofanequalstiffnessandequalstroke2dmicropositioningplatformdrivenbypiezoelectricactuators
AT yansonghao proposalofanequalstiffnessandequalstroke2dmicropositioningplatformdrivenbypiezoelectricactuators
AT fangchaoxu proposalofanequalstiffnessandequalstroke2dmicropositioningplatformdrivenbypiezoelectricactuators
AT junjiejin proposalofanequalstiffnessandequalstroke2dmicropositioningplatformdrivenbypiezoelectricactuators
AT qiangli proposalofanequalstiffnessandequalstroke2dmicropositioningplatformdrivenbypiezoelectricactuators
AT lingtong proposalofanequalstiffnessandequalstroke2dmicropositioningplatformdrivenbypiezoelectricactuators
AT mingzhang proposalofanequalstiffnessandequalstroke2dmicropositioningplatformdrivenbypiezoelectricactuators
AT xiaoyouzhang proposalofanequalstiffnessandequalstroke2dmicropositioningplatformdrivenbypiezoelectricactuators
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