Experimental characterization at nanoscale of single crystal silicon fracture toughness

The work reviews some preliminary recent micromechanical tests aimed at the evaluation of the fracture toughness of silicon. Pre-cracked nano specimens and alternatively notched nano specimens combined with the theory of critical distances (TCD) are compared. The results show that the fracture tough...

Full description

Bibliographic Details
Main Authors: Pasquale Gallo, Takashi Sumigawa, Takayuki Kitamura
Format: Article
Language:English
Published: Gruppo Italiano Frattura 2019-01-01
Series:Frattura ed Integrità Strutturale
Subjects:
Online Access:http://www.gruppofrattura.it/pdf/rivista/numero47/numero_47_art_31.pdf