Characterization of HfO<sub>2</sub> Optical Coatings Deposited by MF Magnetron Sputtering
The aim of this work is to determine the influence of medium frequency magnetron sputtering powers on the various properties of hafnium dioxide (HfO<sub>2</sub>) thin films. Microstructure observations show that an increase in the sputtering power has a significant influence on HfO<su...
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2019-02-01
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| Series: | Coatings |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2079-6412/9/2/106 |