Hot-filament metal oxide deposition (HFMOD): a novel method for depositing thin films of metallic oxides

This short report describes a novel method for the synthesis of metal oxide thin films. The experimental setup consists of a metal filament installed inside a vacuum chamber. The filament can be heated by an ac power supply while oxygen is admitted into the chamber using a mass flowmeter. From react...

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Bibliographic Details
Main Authors: Rouxinol F. Paulo, Trasferetti B. Cláudio, Landers Richard, Moraes Mário A. Bica de
Format: Article
Language:English
Published: Sociedade Brasileira de Química 2004-01-01
Series:Journal of the Brazilian Chemical Society
Subjects:
WO3
XPS
CVD
Online Access:http://www.scielo.br/scielo.php?script=sci_arttext&pid=S0103-50532004000200026