Hot-filament metal oxide deposition (HFMOD): a novel method for depositing thin films of metallic oxides
This short report describes a novel method for the synthesis of metal oxide thin films. The experimental setup consists of a metal filament installed inside a vacuum chamber. The filament can be heated by an ac power supply while oxygen is admitted into the chamber using a mass flowmeter. From react...
Main Authors: | Rouxinol F. Paulo, Trasferetti B. Cláudio, Landers Richard, Moraes Mário A. Bica de |
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Format: | Article |
Language: | English |
Published: |
Sociedade Brasileira de Química
2004-01-01
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Series: | Journal of the Brazilian Chemical Society |
Subjects: | |
Online Access: | http://www.scielo.br/scielo.php?script=sci_arttext&pid=S0103-50532004000200026 |
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