МОДЕЛЬ ЛОКАЛЬНОГО ИОННО-ЛУЧЕВОГО ОСАЖДЕНИЯ ПЛАТИНЫ СФОКУСИРОВАННЫМ ПУЧКОМ ИОНОВ
In this paper, the problems associated with the process of local ion-beam deposition of the material from the gas phase is analyzied. It has been established that the ion-beam deposition of a material from the gas causes a redeposition effect, exposure time and the current of the primary ion beam wh...
| Main Authors: | , |
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| Format: | Article |
| Language: | Russian |
| Published: |
MIREA - Russian Technological University
2017-12-01
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| Series: | Российский технологический журнал |
| Subjects: | |
| Online Access: | https://www.rtj-mirea.ru/jour/article/view/93 |