A Sub-mW 18-MHz MEMS Oscillator Based on a 98-dBΩ Adjustable Bandwidth Transimpedance Amplifier and a Lamé-Mode Resonator

A Sub-mW 18-MHz MEMS Oscillator Based on a 98-dBΩ Adjustable Bandwidth Transimpedance Amplifier and a Lamé-Mode Resonator

This paper presents a microelectromechanical system (MEMS)-based oscillator based on a Lamé-mode capacitive micromachined resonator and a fully differential high-gain transimpedance amplifier (TIA). The proposed TIA is designed using TSMC 65 nm CMOS technology and consumes only 0.9 mA from...

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Bibliographic Details
Main Authors: Anoir Bouchami, Mohannad Y. Elsayed, Frederic Nabki
Format: Article
Language:English
Published: MDPI AG 2019-06-01
Series:Sensors
Subjects:
MEMS-based oscillator
transimpedance amplifier
electrostatic actuation
phase noise
Lamé-mode MEMS resonator
input-referred noise
quality factor
1-dB compression point
Online Access:https://www.mdpi.com/1424-8220/19/12/2680

Internet

https://www.mdpi.com/1424-8220/19/12/2680

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