A Z-axis Quartz Cross-fork Micromachined Gyroscope Based on Shear Stress Detection

Here we propose a novel quartz micromachined gyroscope. The sensor has a simple cross-fork structure in the x-y plane of quartz crystal. Shear stress rather than normal stress is utilized to sense Coriolis’ force generated by the input angular rate signal. Compared to traditional quartz gyroscopes,...

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Bibliographic Details
Main Authors: Peitao Dong, Jianbin Su, Haoxu Wang, Shengyi Li, Xuezhong Wu, Liqiang Xie
Format: Article
Language:English
Published: MDPI AG 2010-03-01
Series:Sensors
Subjects:
Online Access:http://www.mdpi.com/1424-8220/10/3/1573/