A Z-axis Quartz Cross-fork Micromachined Gyroscope Based on Shear Stress Detection
Here we propose a novel quartz micromachined gyroscope. The sensor has a simple cross-fork structure in the x-y plane of quartz crystal. Shear stress rather than normal stress is utilized to sense Coriolis’ force generated by the input angular rate signal. Compared to traditional quartz gyroscopes,...
Main Authors: | , , , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2010-03-01
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Series: | Sensors |
Subjects: | |
Online Access: | http://www.mdpi.com/1424-8220/10/3/1573/ |