A Nanopore Structured High Performance Toluene Gas Sensor Made by Nanoimprinting Method

A Nanopore Structured High Performance Toluene Gas Sensor Made by Nanoimprinting Method

Toluene gas was successfully measured at room temperature using a device microfabricated by a nanoimprinting method. A highly uniform nanoporous thin film was produced with a dense array of titania (TiO2) pores with a diameter of 70~80 nm using this method. This thin film had a Pd/TiO2 nanoporous/Si...

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Bibliographic Details
Main Authors: Yong-Sang Kim, Chi Jung Kang, Hyun Ho Lee, Tae-Sik Yoon, Jung-Min Kim, Kwang-Su Kim, Woon-Hyuk Baek
Format: Article
Language:English
Published: MDPI AG 2010-01-01
Series:Sensors
Subjects:
toluene
gas sensor
MIS structure
nanoimprinting method
titania
nanopore
Online Access:http://www.mdpi.com/1424-8220/10/1/765/

Internet

http://www.mdpi.com/1424-8220/10/1/765/

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