Effect of target-substrate distance on thickness and hardness of carbon thin films on SKD11 steel using target material from battery carbon rods
Carbon thin films on SKD11 steel were deposited by 40 kHz frequency plasma sputtering technique using a waste of battery carbon rods in argon plasma, and their mechanical properties were investigated by various target-substrate distances (1 cm, 1.7 cm, 2 cm, and 2.4 cm). The power used is 340 watts,...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
PC Technology Center
2021-02-01
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| Series: | Eastern-European Journal of Enterprise Technologies |
| Subjects: | |
| Online Access: | http://journals.uran.ua/eejet/article/view/225376 |