Environmental temperature effect on dimensional measurements of atomic force microscopy
Atomic force microscopy (AFM) is increasingly being used as a fundamental tool for dimensional measurements at the nanoscale in the laboratory and in industry. Since the environmental temperature is not controlled in many measurements, or is even varied on purpose, quantification of its effects on A...
| Main Authors: | , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2021-06-01
|
| Series: | Nanotechnology and Precision Engineering |
| Online Access: | http://dx.doi.org/10.1063/10.0003939 |