Design of a High Performance MEMS Pressure Sensor Array with Signal Conditioning Unit for Oceanographic Applications
Design of a high performance MEMS pressure sensor array along with its signal conditioning unit is presented for oceanographic applications. The pressure transducer comprises of an improved design of an array of multiple diaphragm bulk micromachined piezoresistive pressure sensors coupled with a CMO...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2008-11-01
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| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | http://www.sensorsportal.com/HTML/DIGEST/november_08/P_353.pdf |