Influence of Nitrogen Content and Bias Voltage on Residual Stress and the Tribological and Mechanical Properties of CrAlN Films

Influence of Nitrogen Content and Bias Voltage on Residual Stress and the Tribological and Mechanical Properties of CrAlN Films

This study deposited CrAlN coatings from Al<sub>50</sub>Cr<sub>50</sub> targets using high-power impulse magnetron sputtering, with a focus on the effects of nitrogen content and substrate bias voltage on the deposition rate, microstructure, crystal orientation, residual stre...

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Bibliographic Details
Main Authors: Jian-Fu Tang, Ching-Yen Lin, Fu-Chi Yang, Chi-Lung Chang
Format: Article
Language:English
Published: MDPI AG 2020-06-01
Series:Coatings
Subjects:
nitrogen content
CrAlN
residual stress
bias voltage
HiPIMS
Online Access:https://www.mdpi.com/2079-6412/10/6/546

Internet

https://www.mdpi.com/2079-6412/10/6/546

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