Investigation of pulse width effect on structural and optical properties of molybdenum oxide thin films deposited by HiPIMS
In this study, molybdenum oxide thin films are deposited by using high power impulse magnetic sputtering (HiPIMS) at different pulses length of 60, 90, 120, 150 and 180 μs on glass substrates in a combination of reactive and non-reactive gases with a ratio of O2/Ar = 0.66. The structural and optical...
| Main Author: | |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Isfahan University of Technology
2018-12-01
|
| Series: | Iranian Journal of Physics Research |
| Subjects: | |
| Online Access: | http://ijpr.iut.ac.ir/browse.php?a_code=A-10-1389-2&slc_lang=en&sid=1 |