A Nanoscale Plasma Etching Process for Pole Tip Recession of Perpendicular Recording Magnetic Head
<p>The pole tip of perpendicular recording head is constructed in a stacked structure with materials of NiCoFe, NiFe, Al<sub>2</sub>O<sub>3</sub> and AlTiC. The surfaces of different materials are set at different heights below the air-bearing surface of slider. This pa...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Kaunas University of Technology
2016-05-01
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| Series: | Medžiagotyra |
| Subjects: | |
| Online Access: | http://matsc.ktu.lt/index.php/MatSc/article/view/12953 |