A Nanoscale Plasma Etching Process for Pole Tip Recession of Perpendicular Recording Magnetic Head

<p>The pole tip of perpendicular recording head is constructed in a stacked structure with materials of NiCoFe, NiFe, Al<sub>2</sub>O<sub>3</sub> and AlTiC. The surfaces of different materials are set at different heights below the air-bearing surface of slider. This pa...

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Bibliographic Details
Main Authors: Shoubin LIU, Dayao HE
Format: Article
Published: Kaunas University of Technology 2016-05-01
Online Access:http://matsc.ktu.lt/index.php/MatSc/article/view/12953