Review on Multi-Degree-of-Freedom Piezoelectric Motion Stage
Multi-degree-of-freedom (multi-DOF) piezoelectric motion stage is an important part of modern manufacturing industry. In order to perform high precision outputs in a large travel range, various multi-DOF piezoelectric motion stages have been proposed and applied for decades. This paper is concentrat...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2018-01-01
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| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/8491284/ |