Crystallization Behavior and Thermal Analysis of CoFeB Thin Films
We examined two targets containing Co40Fe40B20 and Co60Fe20B20. We deposited Co40Fe40B20 and Co60Fe20B20 monolayer thin films of various thicknesses on glass substrates through DC magnetron sputtering; the thicknesses ranged from 25 to 200 Å. The thermal properties of the Co40Fe40B20 and Co60Fe20B20...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Hindawi Limited
2015-01-01
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| Series: | Journal of Nanomaterials |
| Online Access: | http://dx.doi.org/10.1155/2015/371894 |