Vertically Aligned Carbon Nanotube Array (VANTA) Biosensor for MEMS Lab-on-a-Chip
We describe the fabrication, functionalization and characterization of vertically aligned carbon nanotube arrays (VANTAs) for biological sensor applications. This structure is created using a standard MEMS process and chemical vapor deposition (CVD) multi-walled carbon nanotube (MWNT) post-processin...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2009-10-01
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| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | http://www.sensorsportal.com/HTML/DIGEST/october_09/P_SI_83.pdf |