Yttrium Oxyfluoride Coatings Deposited by Suspension Plasma Spraying Using Coaxial Feeding
The recently discovered yttrium oxyfluoride (YOF) coating has been found to be a highly promising plasma-resistant material which can be coated onto the inner wall of the dry etching chambers used in the manufacturing of the three-dimensional stacking circuits of semiconductors, such as vertical NAN...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2020-05-01
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| Series: | Coatings |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2079-6412/10/5/481 |