Magnetic anisotropy and electrical property of CoZrTaB thin films deposited by oblique sputtering
Soft magnetic materials have been studied extensively in recent years due to their applications in micro-transformers, micro-inductors, spin dependent memories etc. Achieving high uniaxial anisotropy is one of the most important properties for these materials. Oblique angle sputtering without the pr...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2021-02-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/9.0000234 |