MEMS blazed gratings fabricated using anisotropic etching and oxidation sharpening
Micro-electro-mechanical system (MEMS) blazed gratings are the critical optical elements in high resolution micro-spectrometer systems. The MEMS blazed gratings fabricated by conventional methods are not ideal saw-tooth profiles. After the photolithographic and anisotropic etching process, a tiny pl...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2020-06-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/5.0004903 |