Optical Properties of a-SiC:H Films Deposited by Glowdischarge Methods
he optical properties of amorphous silicon carbon films deposited by glowdischarge method have been studied using ultra violet-visible (uv-vis) spectroscopy. The refractive index was calculated by Swanepoel’s formula using transmission data then followed by numerical simulation. The films density te...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Universitas Indonesia
2003-12-01
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| Series: | Makara Seri Sains |
| Subjects: | |
| Online Access: | http://journal.ui.ac.id/science/article/view/372/368 |