Nanofabricated free-standing wire scanners for beam diagnostics with submicrometer resolution
Results on fabrication and experimental characterization of wire scanners (WS) with submicrometer spatial resolution are presented. Independently fabricated at PSI and FERMI by means of nanolithography, the proposed WS solutions consist of 900 and 800 nm wide free-standing stripes ensuring a geometr...
| Main Authors: | , , , , , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
American Physical Society
2020-04-01
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| Series: | Physical Review Accelerators and Beams |
| Online Access: | http://doi.org/10.1103/PhysRevAccelBeams.23.042802 |