The Effect of Thermal Annealing on the Optical Properties of a-SiC:H Films Produced by DC Sputtering Methods: I

The Effect of Thermal Annealing on the Optical Properties of a-SiC:H Films Produced by DC Sputtering Methods: I

Silicon Target Case. The effects of thermal annealing treatment on the optical properties of amorphous silicon carbon films deposited by silicon target in an argon, methane and hydrogen gas mixture have been studied using ultra violet-visible (uv-vis) spectroscopy. Both n and α, and consequently the...

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Bibliographic Details
Main Authors: Lusitra Munisa, Dewi Marianty, Rosari Saleh
Format: Article
Language:English
Published: Universitas Indonesia 2003-04-01
Series:Makara Seri Sains
Subjects:
optical constants
amorphous silicon carbon
sputtering
thermal annealing
hydrogen
void
Online Access:http://journal.ui.ac.id/science/article/view/300/296

Internet

http://journal.ui.ac.id/science/article/view/300/296

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