3D model of flow in micro channels

The micro channels are important components in many micro - electro - mechanical systems (MEMS) and technical systems. They are used to transport a gas or a liquid into devices and the systems. In our work, the gas flows into a micro channel have been studied for various shapes and sizes of the micr...

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Bibliographic Details
Main Authors: Kudryashova Tatiana, Polyakov Sergey
Format: Article
Language:English
Published: EDP Sciences 2017-01-01
Series:MATEC Web of Conferences
Online Access:https://doi.org/10.1051/matecconf/201712504023