OPTIMIZATION TECHNIQUES APPLIED TO INITIAL DESIGNS OF ULTRAVIOLET LITHOGRAPHIC OBJECTIVES

OPTIMIZATION TECHNIQUES APPLIED TO INITIAL DESIGNS OF ULTRAVIOLET LITHOGRAPHIC OBJECTIVES

The optimization of lithographic objectives is a quite challenging task due to many conflicting constraints, limitations and numerous variables. We describe the optimization techniques of starting designs for ultraviolet objectives which were previously generated by the global search algorithm. The...

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Bibliographic Details
Main Authors: Nenad Zoric, Lijo Thomas, Irina G. Smirnova
Format: Article
Language:English
Published: Saint Petersburg National Research University of Information Technologies, Mechanics and Optics (ITMO University) 2019-12-01
Series:Naučno-tehničeskij Vestnik Informacionnyh Tehnologij, Mehaniki i Optiki
Subjects:
global optimization
automated lens design
lithography
uv
global search algorithm
Online Access:https://ntv.ifmo.ru/file/article/19146.pdf

Internet

https://ntv.ifmo.ru/file/article/19146.pdf

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