OPTIMIZATION TECHNIQUES APPLIED TO INITIAL DESIGNS OF ULTRAVIOLET LITHOGRAPHIC OBJECTIVES

OPTIMIZATION TECHNIQUES APPLIED TO INITIAL DESIGNS OF ULTRAVIOLET LITHOGRAPHIC OBJECTIVES

The optimization of lithographic objectives is a quite challenging task due to many conflicting constraints, limitations and numerous variables. We describe the optimization techniques of starting designs for ultraviolet objectives which were previously generated by the global search algorithm. The...

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Main Authors: Nenad Zoric, Lijo Thomas, Irina G. Smirnova
Format: Article
Language:English
Published: Saint Petersburg National Research University of Information Technologies, Mechanics and Optics (ITMO University) 2019-12-01
Series:Naučno-tehničeskij Vestnik Informacionnyh Tehnologij, Mehaniki i Optiki
Subjects:
global optimization
automated lens design
lithography
uv
global search algorithm
Online Access:https://ntv.ifmo.ru/file/article/19146.pdf
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spelling doaj-930048fbde8244e0838ad0e899adbf4c2020-11-25T02:53:07ZengSaint Petersburg National Research University of Information Technologies, Mechanics and Optics (ITMO University)Naučno-tehničeskij Vestnik Informacionnyh Tehnologij, Mehaniki i Optiki2226-14942500-03732019-12-011961022103010.17586/2226-1494-2019-19-6-1022-1030OPTIMIZATION TECHNIQUES APPLIED TO INITIAL DESIGNS OF ULTRAVIOLET LITHOGRAPHIC OBJECTIVESNenad Zoric0Lijo Thomas1Irina G. Smirnova2Research Associate Scientist, University of Novi Sad, Novi Sad, 21000, Serbia; Postgraduate Degree Seeker, ITMO University, Saint Petersburg, 197101, Russian FederationPhD, Research Scientist, Centre de recherche CERVO-Universite Laval, Quebec, G1J 2G3, CanadaPhD, Associate Professor, ITMO University, Saint Petersburg, 197101, Russian FederationThe optimization of lithographic objectives is a quite challenging task due to many conflicting constraints, limitations and numerous variables. We describe the optimization techniques of starting designs for ultraviolet objectives which were previously generated by the global search algorithm. The powerful tools for the global optimization as Automatic Element Insert feature and Saddle points construction were applied to starting points, examining the applicability limited by design considerations. The ray tracing failures and critical lenses in starting designs caused by automatic decisions of the global search algorithm are fixed and replaced by Saddle point construction. The results of this work and presented techniques of the global optimization are valid and relevant for any on-axis complex optical system.https://ntv.ifmo.ru/file/article/19146.pdfglobal optimizationautomated lens designlithographyuvglobal search algorithm
collection DOAJ
language English
format Article
sources DOAJ
author Nenad Zoric
Lijo Thomas
Irina G. Smirnova
spellingShingle Nenad Zoric
Lijo Thomas
Irina G. Smirnova
OPTIMIZATION TECHNIQUES APPLIED TO INITIAL DESIGNS OF ULTRAVIOLET LITHOGRAPHIC OBJECTIVES
Naučno-tehničeskij Vestnik Informacionnyh Tehnologij, Mehaniki i Optiki
global optimization
automated lens design
lithography
uv
global search algorithm
author_facet Nenad Zoric
Lijo Thomas
Irina G. Smirnova
author_sort Nenad Zoric
title OPTIMIZATION TECHNIQUES APPLIED TO INITIAL DESIGNS OF ULTRAVIOLET LITHOGRAPHIC OBJECTIVES
title_short OPTIMIZATION TECHNIQUES APPLIED TO INITIAL DESIGNS OF ULTRAVIOLET LITHOGRAPHIC OBJECTIVES
title_full OPTIMIZATION TECHNIQUES APPLIED TO INITIAL DESIGNS OF ULTRAVIOLET LITHOGRAPHIC OBJECTIVES
title_fullStr OPTIMIZATION TECHNIQUES APPLIED TO INITIAL DESIGNS OF ULTRAVIOLET LITHOGRAPHIC OBJECTIVES
title_full_unstemmed OPTIMIZATION TECHNIQUES APPLIED TO INITIAL DESIGNS OF ULTRAVIOLET LITHOGRAPHIC OBJECTIVES
title_sort optimization techniques applied to initial designs of ultraviolet lithographic objectives
publisher Saint Petersburg National Research University of Information Technologies, Mechanics and Optics (ITMO University)
series Naučno-tehničeskij Vestnik Informacionnyh Tehnologij, Mehaniki i Optiki
issn 2226-1494
2500-0373
publishDate 2019-12-01
description The optimization of lithographic objectives is a quite challenging task due to many conflicting constraints, limitations and numerous variables. We describe the optimization techniques of starting designs for ultraviolet objectives which were previously generated by the global search algorithm. The powerful tools for the global optimization as Automatic Element Insert feature and Saddle points construction were applied to starting points, examining the applicability limited by design considerations. The ray tracing failures and critical lenses in starting designs caused by automatic decisions of the global search algorithm are fixed and replaced by Saddle point construction. The results of this work and presented techniques of the global optimization are valid and relevant for any on-axis complex optical system.
topic global optimization
automated lens design
lithography
uv
global search algorithm
url https://ntv.ifmo.ru/file/article/19146.pdf
work_keys_str_mv AT nenadzoric optimizationtechniquesappliedtoinitialdesignsofultravioletlithographicobjectives
AT lijothomas optimizationtechniquesappliedtoinitialdesignsofultravioletlithographicobjectives
AT irinagsmirnova optimizationtechniquesappliedtoinitialdesignsofultravioletlithographicobjectives
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