Study of optimization condition for spin coating of the photoresist film on rectangular substrate by Taguchi design of an experiment
There are four parameters concerning the spin coating of a positive photoresist film. This paper focuses on spin coating of the positive photoresist Clariantz AZ-P4620 on a 2x7 cm rectangular substrate. By ways of Taguchi L16 (44) method, the number of experiments can be reduced from 256 to 16. By a...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Prince of Songkla University
2009-08-01
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| Series: | Songklanakarin Journal of Science and Technology (SJST) |
| Subjects: | |
| Online Access: | http://www.rdoapp.psu.ac.th/html/sjst/journal/31-3/0125-3395-31-3-331-335.pdf |