The oscillating and electrostatic characteristics of microelectromechanical system cantilever structure analyzed based on the air gap domain
Extensive modeling and simulation of the damping phenomenon, electrostatic actuation, and structural vibration analysis are performed. The governing partial differential equations of cantilever plate are obtained, and the resonant frequencies are calculated from the equilibrium equations. The dampin...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
SAGE Publishing
2018-12-01
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| Series: | Journal of Low Frequency Noise, Vibration and Active Control |
| Online Access: | https://doi.org/10.1177/1461348418765954 |