Etched Silicon-on-Insulator Microring Resonator for Ultrasound Measurement

Etched Silicon-on-Insulator Microring Resonator for Ultrasound Measurement

A novel integrated optical ultrasound sensor based on silicon-on-insulator (SOI) platform is proposed, theoretically analyzed and experimentally demonstrated. By using a selectively etched SOI microring resonator in an add-drop structure, the technique provides a linear and distortion-free sensing r...

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Bibliographic Details
Main Authors: Wenjian Yang, Shijie Song, Keith Powell, Xiaoyi Tian, Liwei Li, Linh Nguyen, Xiaoke Yi
Format: Article
Language:English
Published: IEEE 2020-01-01
Series:IEEE Photonics Journal
Subjects:
Optical sensors
optical resonators
photonic integrated circuits
integrated optics devices.
Online Access:https://ieeexplore.ieee.org/document/9026777/

Internet

https://ieeexplore.ieee.org/document/9026777/

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