Quantitative Evaluation of Dielectric Breakdown of Silicon Micro- and Nanofluidic Devices for Electrophoretic Transport of a Single DNA Molecule

Quantitative Evaluation of Dielectric Breakdown of Silicon Micro- and Nanofluidic Devices for Electrophoretic Transport of a Single DNA Molecule

In the present study, we quantitatively evaluated dielectric breakdown in silicon-based micro- and nanofluidic devices under practical electrophoretic conditions by changing the thickness of the insulating layer. At higher buffer concentration, a silicon nanofluidic device with a 100 nm or 250 nm si...

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Bibliographic Details
Main Authors: Mamiko Sano, Noritada Kaji, Qiong Wu, Toyohiro Naito, Takao Yasui, Masateru Taniguchi, Tomoji Kawai, Yoshinobu Baba
Format: Article
Language:English
Published: MDPI AG 2018-04-01
Series:Micromachines
Subjects:
dielectric breakdown
insulation
silicon devices
DNA
electrophoresis
Online Access:http://www.mdpi.com/2072-666X/9/4/180

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http://www.mdpi.com/2072-666X/9/4/180

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