Design, fabrication and characterization of piezoelectric cantilever MEMS for underwater application

Design, fabrication and characterization of piezoelectric cantilever MEMS for underwater application

This work shows a preliminary microfabrication route for a novel directional hydrophone based on a cross-shaped design of piezoelectric cantilevers. A thin layer of aluminum nitride (AlN) using Molybdenum (Mo) thin film as electrodes will be exploited as piezoelectric functional layer for the microf...

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Bibliographic Details
Main Authors: B. Abdul, V.M. Mastronardi, A. Qualtieri, F. Guido, L. Algieri, F. Rizzi, M. De Vittorio
Format: Article
Language:English
Published: Elsevier 2020-06-01
Series:Micro and Nano Engineering
Subjects:
MEMS
Cantilevers
AlN
Piezoelectricity
Laser Doppler Vibrometer
Hydrophone
Online Access:http://www.sciencedirect.com/science/article/pii/S2590007220300058

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http://www.sciencedirect.com/science/article/pii/S2590007220300058

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