CMOS-Compatible Integrated Spectrometer Based on Echelle Diffraction Grating and MSM Photodetector Array

CMOS-Compatible Integrated Spectrometer Based on Echelle Diffraction Grating and MSM Photodetector Array

We demonstrate an integrated spectrometer-on-a-chip composed of an echelle diffraction grating (EDG) and metal-semiconductor-metal (MSM) waveguide photodetector array based on silicon-on-insulator (SOI). In the passive section, silicon oxynitride (SiON) is chosen as the material for the waveguide co...

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Bibliographic Details
Main Authors: Xiao Ma, Mingyu Li, Jian-Jun He
Format: Article
Language:English
Published: IEEE 2013-01-01
Series:IEEE Photonics Journal
Subjects:
Spectrometer-on-a-chip
optoelectronic integration
echelle diffraction grating (EDG)
metal–semiconductor–metal (MSM) photodetector array
Online Access:https://ieeexplore.ieee.org/document/6472720/

Internet

https://ieeexplore.ieee.org/document/6472720/

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