Qualitative properties for a sixth–order thin film equation
In this article, the author studies the qualitative properties of weak solutions for a sixth‐order thin film equation, which arises in the industrial application of the isolation oxidation of silicon. Based on the Schauder type estimates, we establish the global existence of classical solutions for...
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| Format: | Article |
| Language: | English |
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Vilnius Gediminas Technical University
2010-11-01
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| Series: | Mathematical Modelling and Analysis |
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| Online Access: | https://journals.vgtu.lt/index.php/MMA/article/view/6037 |