Interferometry Based EUV Spectrometer
A compact and wavelength-calibration-free interferometric scheme was numerically and experimentally investigated using an extreme ultraviolet (EUV) source generated by a laser-produced plasma. A Michelson-type interferometer with a common path, formed by a Si/Mo-multilayer-based beam splitter and mi...
Main Authors: | Yen-Yin Li, Yin-Wen Lee, Tuan-Shu Ho, Rong-Tz Wei, Po-Yen Lai, Kao-Sheng Jao, I-Chou Wu, Shih-Hung Chen, Sheng-Lung Huang |
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Format: | Article |
Language: | English |
Published: |
IEEE
2017-01-01
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Series: | IEEE Photonics Journal |
Subjects: | |
Online Access: | https://ieeexplore.ieee.org/document/7961150/ |
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