Tensile Strength of Silicon Nanowires Batch-Fabricated into Electrostatic MEMS Testing Device

Tensile Strength of Silicon Nanowires Batch-Fabricated into Electrostatic MEMS Testing Device

The tensile strength of a silicon nanowire (SiNW) that had been integrated into a silicon-on-insulator (SOI)-based microelectromechanical system (MEMS) device was measured using electrostatic actuation and sensing. SiNWs of about 150 nm diameter and 5 μm length were batch-fabricated into a 5-...

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Bibliographic Details
Main Authors: Toshiyuki Tsuchiya, Tetsuya Hemmi, Jun-ya Suzuki, Yoshikazu Hirai, Osamu Tabata
Format: Article
Language:English
Published: MDPI AG 2018-05-01
Series:Applied Sciences
Subjects:
silicon
nanowire
tensile testing
fracture
MEMS
Online Access:http://www.mdpi.com/2076-3417/8/6/880

Internet

http://www.mdpi.com/2076-3417/8/6/880

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