Opto-Acoustic Method for the Characterization of Thin-Film Adhesion
The elastic property of the film-substrate interface of thin-film systems is characterized with an opto-acoustic method. The thin-film specimens are oscillated with an acoustic transducer at audible frequencies, and the resultant harmonic response of the film surface is analyzed with optical interfe...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2016-05-01
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| Series: | Applied Sciences |
| Subjects: | |
| Online Access: | http://www.mdpi.com/2076-3417/6/6/163 |