An Electrothermal Cu/W Bimorph Tip-Tilt-Piston MEMS Mirror with High Reliability
This paper presents the design, fabrication, and characterization of an electrothermal MEMS mirror with large tip, tilt and piston scan. This MEMS mirror is based on electrothermal bimorph actuation with Cu and W thin-film layers forming the bimorphs. The MEMS mirror is fabricated via a combination...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2019-05-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/10/5/323 |