Monolithic Low Noise and Low Zero-g Offset CMOS/MEMS Accelerometer Readout Scheme

Monolithic Low Noise and Low Zero-g Offset CMOS/MEMS Accelerometer Readout Scheme

A monolithic low noise and low zero-g offset CMOS/MEMS accelerometer and readout scheme in standard 0.18 μm CMOS mixed signal UMC process is presented. The low noise chopper architecture and telescopic topology is developed to achieve low noise. The experiments show noise floor is 421.70 &a...

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Bibliographic Details
Main Authors: Yu-Sian Liu, Kuei-Ann Wen
Format: Article
Language:English
Published: MDPI AG 2018-11-01
Series:Micromachines
Subjects:
Accelerometer readout
low noise
low zero-g offset
Online Access:https://www.mdpi.com/2072-666X/9/12/637

Internet

https://www.mdpi.com/2072-666X/9/12/637

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