A Method to Control Dynamic Errors of the Stylus-Based Probing System for the Surface Form Measurement of Microstructures
Dynamic errors of the stylus-based probing system seriously affect the measurement accuracy in surface quality detection on microstructures. A method, which is focused on measuring the surface form of microgears, microholes on the injector nozzle, and so forth, is proposed to control dynamic errors...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Hindawi Limited
2016-01-01
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| Series: | Journal of Nanomaterials |
| Online Access: | http://dx.doi.org/10.1155/2016/3727514 |