A Heterodyne Interferometer for Simultaneous Measurement of Roll and Straightness
A heterodyne interferometer for simultaneous measurement of roll and straightness is proposed for precision linear stages. In the interferometer, the roll and vertical or horizontal straightness are both directly calculated from the phase difference between the measurements and reference signals. Th...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2019-01-01
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| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/8842566/ |