Spatial Location in Integrated Circuits through Infrared Microscopy

Spatial Location in Integrated Circuits through Infrared Microscopy

In this paper, we present an infrared microscopy based approach for structures’ location in integrated circuits, to automate their secure characterization. The use of an infrared sensor is the key device for internal integrated circuit inspection. Two main issues are addressed. The first concerns th...

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Bibliographic Details
Main Authors: Raphaël Abelé, Jean-Luc Damoiseaux, Redouane El Moubtahij, Jean-Marc Boi, Daniele Fronte, Pierre-Yvan Liardet, Djamal Merad
Format: Article
Language:English
Published: MDPI AG 2021-03-01
Series:Sensors
Subjects:
thermal imaging
microscopy
secure characterization
pattern location
autofocus
polynomial decomposition
Online Access:https://www.mdpi.com/1424-8220/21/6/2175

Internet

https://www.mdpi.com/1424-8220/21/6/2175

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